CsLiB₆O₁₀ (CLBO)
Discovered by Osaka University in 1993

A nonlinear optical crystal Cesium Lithium Borate Crystal CsLiB₆O₁₀ (CLBO) has a wide transparent wavelength region (2.7μm to 180nm) and birefringence suitable for the generation of deep-ultraviolet radiations such as 266nm, 213nm, and 193nm. CLBO has already been put to practical use in several coherent DUV sources for semiconductor inspection applications. Precise processing, such as drilling in printed circuit boards, requires high-average DUV sources operated at a kilohertz repetition rate. Osaka University and SOSHO CHOKO have newly developed high-quality CLBO (Osaka-CLBO^TM) for high-power DUV users.